Hello, Tung.
In general, to achieve higher step rates we recommend following the tips outlined in this forum post by Ben.
If you tell me more about your system, I might be able point out something obvious that you can change. What speeds are you able to achieve before and after revising your delay time? What did you set the current limit on your MP6500 to? How are you supplying power? Also, I cannot find a stepper motor with “23HS3007-02” in its name; can you link to a product page or datasheet for your motor?
-Jon